Abstract
Engineering metamaterials with tunable resonances from mid-infrared to near-infrared wavelengths could have far-reaching consequences for chip based optical devices, active filters, modulators, and sensors. Utilizing the metal-insulator phase transition in vanadium oxide (VO(2)), we demonstrate frequency-tunable metamaterials in the near-IR range, from 1.5 - 5 microns. Arrays of Ag split ring resonators (SRRs) are patterned with e-beam lithography onto planar VO(2) and etched via reactive ion etching to yield Ag/VO(2) hybrid SRRs. FTIR reflection data and FDTD simulation results show the resonant peak position red shifts upon heating above the phase transition temperature. We also show that, by including coupling elements in the design of these hybrid Ag/VO(2) bi-layer structures, we can achieve resonant peak position tuning of up to 110 nm.
Highlights
Electromagnetic resonances in subwavelength metallic resonators can be used to engineer optical responses not found in natural materials [1,2]
Active metamaterials have been demonstrated at terahertz frequencies using carrier depletion in GaAs [15,16], photoexcitation of free charge carries in Si [17], and the metal-insulator phase transition in vanadium oxide thin films [18]
We propose an alternative geometry consisting of self-aligned, hybrid Ag/VO2 Split-ring resonators (SRRs) bi-layers as an approach to tuning the metamaterial response in the near-IR by controlling the resonator geometry with the phase transition
Summary
Electromagnetic resonances in subwavelength metallic resonators can be used to engineer optical responses not found in natural materials [1,2]. Active metamaterials have been demonstrated at terahertz frequencies using carrier depletion in GaAs [15,16], photoexcitation of free charge carries in Si [17], and the metal-insulator phase transition in vanadium oxide thin films [18]. Integrating materials with tunable electrical or optical properties allows further control over the resonant response in metamaterials. We propose an alternative geometry consisting of self-aligned, hybrid Ag/VO2 SRR bi-layers as an approach to tuning the metamaterial response in the near-IR by controlling the resonator geometry with the phase transition. Drastic changes in the optical properties of VO2 with the phase transition enable control over the transmission and reflection properties of nanophotonic structures, such as nanoparticles [24,25], hole arrays [26], and metamaterials [18]
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