Abstract
An attempt was made to develop a new type of laser interferometer which sweeps the oscillation frequency of the laser so as to improve the position control accuracy in microfabrication process. By knowing the wave lengths at which the interference intensity takes the extreme values, the optical path difference between the reference path and the object path was obtained without moving the object. In experiment, one resonator mirror of a He–Ne laser was oscillated by a piezoelectric transducer to oscillate the laser wave length. Four-figures resolution was obtained experimentally.
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