Abstract
Indentation tests using Vicker's pyramidal and Rockwell spherical diamond indenters were performed for polycrystalline diamond film deposited by chemical vapour deposition (CVD) on SiC substrate. Two types of film with different crystal sizes were tested. One is a film with grain size of 5 to 10 μm, denoted as MCD. Another one is a film with grain size of less than 100 nm, denoted as NCD. In the Vicker's test, we observed clear indentation and radial cracks for the NCD film, suggesting that micro-cracks tend to generate along the weak grain boundaries. Young's modulus, estimated from unloading curve of both films, agrees well with the value (928 GPa) estimated by the laser ultrasonic method. Rockwell indentation test predicts that the adhesion of the NCD film is lower than that of the MCD, and compressive residual stress of the MCD is much larger than that of the NCD. We observed ring cracks and detected acoustic emission (AE) signals from the ring cracks.
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