Abstract

A Fourier optics calculation of image formation in low energy electron microscopy(LEEM) is presented. The adaptation of the existing theory for transmission electronmicroscopy to the treatment of LEEM and other forms of cathode lens electronmicroscopy is explained. The calculation incorporates imaging errors that are caused bythe objective lens (aberrations), contrast aperture (diffraction), imperfect sourcecharacteristics, and voltage and current instabilities. It is used to evaluate theappearance of image features that arise from phase objects such as surface steps andamplitude objects that produce what is alternatively called amplitude, reflectivityor diffraction contrast in LEEM. This formalism can be used after appropriatemodification to treat image formation in other emission microscopies. Implications forimage formation in the latest aberration-corrected instruments are also discussed.

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