Formation processes of nanometer sized particles in low pressure Ar∕CH[sub 4] rf plasmas

Abstract

In this paper, formation and growth processes of nanometer and micrometer sized dust particles in low pressure Ar/CH4 rf (13.56 MHz) plasmas are investigated as function of temperature in the range 25–100 °C. During experiments the pressure was typically 0.8 mbar and the forward power to the plasma was ∼70 Watt. Measuring the fundamental voltage, current and phase angle together with their harmonics (up to the fourth) gives a good method to monitor the creation and growth of these dust particles in time. Furthermore, laser light scattering measurements are performed to give information about the dust particle density. It has been shown that dust particle formation in these conditions depends greatly on temperature.In this paper, formation and growth processes of nanometer and micrometer sized dust particles in low pressure Ar/CH4 rf (13.56 MHz) plasmas are investigated as function of temperature in the range 25–100 °C. During experiments the pressure was typically 0.8 mbar and the forward power to the plasma was ∼70 Watt. Measuring the fundamental voltage, current and phase angle together with their harmonics (up to the fourth) gives a good method to monitor the creation and growth of these dust particles in time. Furthermore, laser light scattering measurements are performed to give information about the dust particle density. It has been shown that dust particle formation in these conditions depends greatly on temperature.