Formation of Well Aligned ZnO Nanorods Grown on Silicon Substrate by Chemical Bath Deposition Method

Abstract

Zinc oxide (ZnO) nanorods have been grown on silicon substrate by chemical bath deposition method in an aqueous solution that contained zinc nitrate hexahydrate and hexamethylenetetramine. The ZnO seed layer was deposited on substrate to promote growth of ZnO nanorods. Growth temperature was varying in order to form well aligned ZnO nanorods From XRD analysis confirmed that grown ZnO nanorods has wurtzite crystal structure and grown in the [10 direction. Well aligned and better size distribution of ZnO nanorods obtained at 75°C for 1h.