Abstract

The D1-center was first detected in H-soaked silicon after electron irradiation and subsequent annealing at 350°C. In the present study, we observe this center also in irradiated oxygen-rich silicon after hydrogenation by chemical etching at room temperature. The analysis of the depth profiles near the etched surface shows that the center contains one hydrogen atom. The non-hydrogenated precursor of the D1-center is a radiation defect, which anneals out at ∼400°C. The precursor introduction rate in the oxygen-rich, moderately doped crystals is comparable to that of the A-center. From our studies we identify the D1-center as the CiOiH complex.

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