Formation of sub-100-nm periodic nanostructure on DLC with few-cycle laser pulses at low fluence

Abstract

We report that few-cycle laser pulses at low fluence can produce sub-100 nm periodic nanostructures on DLC surfaces through nanoablation induced by short-range surface plasmon polaritons (SR-SPPs). The 7-fs and 100-fs laser pulses from Ti:sapphire lasers were used. The period of the nanostructures with 7-fs pulses was much smaller than those with 100-fs pulses. The Raman spectrum showed that the modified layer in a DLC surface irradiated with 7-fs pulses was thinner than that with 100-fs. By using a model target, the period calculated for the excitation of SR-SPPs was in good agreement with that in the experiments.