Abstract
The optically polished LiNbO3 crystal was implanted with 3.0 MeVnickel ions to a dose of 8×1014 ions/cm2. Theimplanted sample was orderly annealed at different temperatures fordifferent times in air ambient. The waveguide properties before andafter annealing were investigated. Dark modes were observed by theprism coupling technique. The reconstructed refractive index profileswere obtained with the reflectivity calculation method. With the fibreprobe technique, the attenuation of the Ni-implanted barrier-confinedwaveguide was measured for the first time. The waveguide loss wasreduced from 1.65 dB/cm to 1.19 dB/cm when annealing was at 300 degrees Cfor 30 min. With the annealing temperature increasing to 370 degrees C,only fewer broad dark modes were found. It is indicated that thelattice damage by implantation began to resume under this annealingcondition. After annealing at 380 degrees C for 60 min, all the darkmodes disappeared.
Published Version
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