Abstract
This chapter surveys nonequilibrium phase formation by implantation [1–3]. Such crystalline or amorphous metastable systems are characterized by not being in the lowest energy state and can be formed by the athermal process of implantation. Crystalline systems may be characterized by metastable solid solutions or by a metastable structure which may, for example, be stabilized by the implanted impurities. Aitorphous systems are characterized by no long range order and their formation and return to equilibrium sometimes involves metastable intermediate crystalline phases. Upon heating the metastable phases will return to equilibrium either via diffusion, as in the case of phase separation, or via diffusion- less means, as in the case of purely structural transformations.
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