Formation of laser-induced periodic surface nanometric concentric ring structures on silicon surfaces through single-spot irradiation with orthogonally polarized femtosecond laser double-pulse sequences

Wei Liu,Ji Huang,Shaojun Wang,Chen Li,Lan Jiang,Zhaoling Qiu,Jiangang Yin,Suocheng Wang,Jie Hu,Jiangang Lu,Hailin Liu

doi:10.1515/nanoph-2020-0568

Wei Liu, Ji Huang + Show 9 more

Open Access

https://doi.org/10.1515/nanoph-2020-0568

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Journal: Nanophotonics	Publication Date: Jan 5, 2021
Citations: 10	License type: CC BY 4.0

Affiliation: Beijing Institute of Technology

Abstract

Abstract In this study, we report the formation of laser-induced periodic surface nanometric concentric ring structures on silicon surfaces through single-spot irradiation with orthogonally polarized femtosecond laser double-pulse sequences (OP pulses). The period of the ring structures is marginally smaller than the irradiated laser’s wavelength, which indicates that the structures are a type of low-spatial-frequency laser-induced periodic surface structures. Regular nanometric concentric ring structures can be formed when the time delay between two subpulses is approximately 1 ps (roughly from 500 fs to 1.5 ps) and the number of laser bursts is approximately 4. The formation mechanism of the concentric ring structures is attributed to the surface wave (i.e., cylindrical wave) stimulated by OP pulses through single-spot irradiation is radially distributed. Large area of concentric ring structures eliminating anisotropy in the generation of structural colors was shown in this paper.

Highlights

Nanometric concentric ring structures have attracted considerable research interest for numerous applications, such as plasmonic lens manufacturing [1, 2], surfaceenhanced Raman scattering [3, 4], laser beam shaping [5, 6] and the modulation of photonic nanojets [7]
In this study, we report the formation of laserinduced periodic surface nanometric concentric ring structures on silicon surfaces through single-spot irradiation with orthogonally polarized femtosecond laser double-pulse sequences (OP pulses)
One of the most common types of structures fabricated by femtosecond laser is laser-induced periodic surface structures (LIPSS; in this study, we refer to low-spatial-frequency LIPSS [LSFL])

Summary

Introduction

Nanometric concentric ring structures have attracted considerable research interest for numerous applications, such as plasmonic lens manufacturing [1, 2], surfaceenhanced Raman scattering [3, 4], laser beam shaping [5, 6] and the modulation of photonic nanojets [7]. One of the most common types of structures fabricated by femtosecond laser is laser-induced periodic surface structures (LIPSS; in this study, we refer to low-spatial-frequency LIPSS [LSFL]) The period of these structures is marginally smaller than the irradiation laser wavelength, which makes them an ideal option for fabricating nanometric concentric ring structures. As illustrated in Figure 1(B), we introduce a new approach for fabricating laser-induced periodic surface nanometric concentric ring structures (a type of LSFL) with a period marginally smaller than the irradiated laser’s wavelength on silicon surfaces. This approach involves fabricating the nanometric structures through single-spot irradiation with OP pulses. Large-area concentric ring structures that eliminate anisotropy in the generation of structural colors were fabricated

Results and discussion

Detailed analysis of nanometric concentric ring structures

Application of concentric ring structures in structural color

Conclusion