Abstract
AbstractThe control of nanoholes formed by anodic oxidation of aluminum (Al) was investigated using AFM nano-indentation on Al film prior to the anodic oxidation. It is well known that ordered trigonal nanohole arrays are formed under certain voltage conditions of anodic oxidation of Al. We succeeded in forming both tetragonal and trigonal arrays of alumina nanoholes on a SiO2/Si- substrate by using nano-indentation on the surface of sputtered pure Al film. The ordered array of nanoholes was obtained at indentation intervals that were close to the nearest neighbor distance of nanoholes in the self-organization condition. Furthermore, we fabricated tetragonal and hexagonal Al nanodot arrays by the selective removal of porous alumina film.
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