Abstract
The characteristics of a sol-gel derived Pb(Zr,TiO) 3 capacitor with polycrystalline SrRuO 3 electrodes deposited by reactive sputtering were evaluated. A single perovskite phase Pb(Zr,Ti)O 3 film with columnar grain structure was formed on SrRuO 3 substrates since nucleation of Pb(Zr,Ti)O 3 took place at the interface with SrRuO 3 . A Pb(Zr,Ti)O 3 capacitor with top and bottom SrRuO 3 electrodes exhibited good polarization reversibility. Remanent polarization at 5.0 V was 20.8 μ c/cm 2 . No degradation of remanent polarization was observed up to switching cycles of 1x10 10 , Polycrystalline SrRuO 3 thin film is expected to be a good candidate for the electrode material of Pb(Zr,Ti)O 3 capacitors.
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