Formation of 10-μm-level patterned organic thin film using microthermal evaporation

Abstract

This article reports the fabrication of 10-μm-level stripe patterns on an organic layer using microthermal evaporation. During this process, an organic layer is coated on a glass substrate with a bridge-type microheater array, and then selectively evaporated and deposited to form a fine pattern onto another glass substrate, separated by a micron-scale gap from the microheater array. Using a unique numerical model for microthermal evaporation, thickness profiles of the pattern were calculated and matched to experimental data. Furthermore, high optical qualities of the transferred luminescent pattern layer were confirmed using microphotoluminescence spectroscopy. This microthermal evaporation method confirms the feasibility of fabricating fine organic patterns with scalability to larger sizes.