Abstract
Surface modification of austenitic stainless steel by plasma-based ion implantation at elevated temperatures below 450°C has been studied experimentally. The nitrogen depth profile at room temperature was similar to that obtained by TRIM code simulation, but the depth of nitrogen penetration increases with target temperature and reaches a few micrometers at a treatment condition of 450°C and an implantation time of 2 h. High-dose nitrogen implantation exceeding 1018 cm−2 at temperatures above 350°C results in the formation of expanded austenite phase (supersaturated f.c.c. phase) with little CrN precipitation, leading to remarkable enhancement of surface hardness without loss of corrosion resistance. © 2004 Wiley Periodicals, Inc. Electr Eng Jpn, 148(4): 9–16, 2004; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/eej.10340
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