Abstract
Carbon nitride thin films were synthesized on Si(100) substrates by pulsed Nd:YAG laser deposition. Several spectral lines originating from the neutral and ionic species, such as carbon atoms, carbon ions, carbon molecules and carbon nitride molecules were identified in the plasma plume. The surface morphology of the carbon nitride thin films reveals numerous droplets on the films out of which several are spiral shaped. The N/C composition ratio is increased from 0.18 to 0.25 with increasing substrate bias voltage. Fourier transform infrared spectroscope absorption spectra show two characteristic bands: a broad band composed of the graphite G-band and disordered D-band of carbon, and another associated with the CN triple bond. Raman spectra have also been used to characterize the films.
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