Formation and luminescent properties of face-centered-cubic Si nanocrystals in silica matrix by magnetron sputtering with substrate bias

Abstract

Si nanocrystals with face-centered-cubic (fcc) structure were fabricated using common sputtering technique, but applying bias on the substrate, the thermodynamic calculation indicates that the bombardment of Ar+ ions arising from the bias should be responsible for the crystallization and phase transition of Si nanocrystals. The silica films containing fcc-Si nanocrystals give strong blue and ultraviolet light emissions, which suggest that the band structure of Si material could be modified by changing the crystal structure.