Abstract
High-density, magnetically soft Fe cluster-assembled films were obtained at room temperature by an energetic cluster deposition. Size-monodispersed Fe clusters with the mean cluster size d = 9, 13 and 16 nm were produced using a plasma-gas-condensation technique. Ionized clusters in cluster beam were accelerated electrically and deposited onto the substrate together with neutral clusters from the same cluster source. The morphology, microstructure and magnetic properties of the cluster-assembled films have been studied by an atomic force microscopy, scanning electron microscopy, transmission electron microscopy, and superconducting quantum interference device magnetometer. By increasing the impact energy of the ionized clusters up to 0.6 eV/atom, the Fe cluster-assembled film has a packing fraction of 0.86±0.03, and reveals a soft magnetic behavior. In addition, it is found that oxidization of the cluster-assembled films is remarkably suppressed with the increase in the density of the films.
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