Abstract
In our previous work, a system of two-dimensional equations for piezoelectric thin-film acoustic wave resonators (FBAR) has been derived and then successfully applied on the free vibration analysis of a finite FBAR plate. In this paper, we analyzed the forced vibrations of FBAR with alternating voltage applied on its electrodes. The derived two dimensional equations were simplified based on straight-crested wave approximations and were rewritten into matrix formalism by state-vector approach. With the knowledge of matrix function, the state-vector equation was successfully solved. Results of admittance were obtained with the dependence on the driving frequency and the aspect ratio. The obtained figure was compared with the frequency spectra obtained in free vibration analysis. Different aspect ratios and quality factors were taken to study the effects of them on the admittance. It is shown that admittance is highly influenced by mode couplings. Thus the work in this paper will be important for the thorough understanding of the coupling vibration of FBAR and its optimization design.
Highlights
Piezoelectric crystals have been widely used as frequency standards in many fields
Thin-film bulk acoustic wave resonator operating at thickness-extensional mode with couplings to in-plane extensional, flexural, and first and second order thickness-shear modes is studied in this paper
The presented work mainly focuses on the forced vibration analysis of film bulk acoustic wave resonator (FBAR)
Summary
Piezoelectric crystals have been widely used as frequency standards in many fields. Acoustic wave resonators made of piezoelectric materials are key components in a lot of electronic equipment. During the last few years, researchers have succeeded in depositing a qualified thin piezoelectric film of AlN or ZnO on a silicon layer to form a thin-film bulk acoustic wave resonator (FBAR).[9] Compared with the conventional crystal resonators, FBARs have several advantages including higher working frequency and smaller size, which are more suitable for the fast-developing technology today. Plate theory has been a standard choice in the coupling vibration analysis of piezoelectric quartz crystal resonator working in high frequency. More literatures of this theory were summarized and reviewed in Ref. 14. The electrical admittance which is of the same important for resonator can only obtained through forced vibration analysis. Conclusions obtained in this paper can be of great significance for the optimization design of FBAR
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