Focusing of heavy ion beams by a high-current plasma lens

Abstract

Results are presented from studies of the focusing of wide-aperture low-energy (100–400 eV) and moderate-energy (5–25 keV) beams of heavy-metal ions by a high-current electrostatic plasma lens. It is found experimentally that, because of the significant electron losses, the efficient focusing of such beams can be achieved only if the external potentials at the plasma-lens electrodes are maintained constant. Static and dynamic characteristics of the lens are studied under these conditions. It is shown that, as the beam current and the electrode voltage increase, the maximum electrostatic field in the lens tends to a certain limiting value because of the increase in the spatial potential near the lens axis. The role of spherical and moment aberrations in the focusing of wide-aperture low-divergence ion beams is revealed. It is shown that, even when spherical aberrations are minimized, unremovable moment aberrations decrease the maximum compression ratio of a low-energy heavy-ion beam because of the charge separation of multiply charged ions in the focal region. At the same time, as the ion energy increases, the role of the moment aberrations decreases and the focusing of high-current heavy-ion beams by a plasma lens becomes more efficient than the focusing of light-ion (hydrogen) beams. This opens up the possibility of using electrostatic plasma lenses to control ion beams in high-dose ion implanters and high-current accelerators of heavy ions.