Abstract
The focused ion beam (FIB) technology has become increasingly popular fabrication and characterization tool across many research areas from nanotechnology, material science, microelectronic industry, life science, biology, and medicine. FIB was specially recognized as an attractive tool or the fabrication of micro- and nanostructures with complex geometries and shapes. This chapter presents the basic introduction of FIB dual-beam system and its operation modes, followed by description of instrument in more details. The review has emphasis on FIB fabrication of nanostructures by milling and deposition methods with particular focus on fabrication of nanopatterns and nanopore arrays. Various efforts to fabricate micro- and nanoscale structure and geometrically complex structure are described. Finally, recent developments of applications of FIB in different areas of material science and life science are briefly reviewed.
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