Fly's Eye Beam

Abstract

JPSA Laser’s new Fly’s Eye Beam Homogenizer converts the characteristically non-uniform beam of a UV Excimer laser into a homogeneous beam with 95% uniformity while utilizing >80% of the laser power. This long working distance single element array easily adapts to most commercial excimer lasers, and offers optimum price/performance ratio (single element for lowest cost and lowest beam loss). The JPSA Fly’s Eye Beam Homogenizer’s long working distance — typically between 1–2 meters — provides a beam size ranging from 8mm to 1.5cm. It is easily re-imaged due to the long working distance and slow optical F-number.Excimer laser beams are not perfectly uniform in intensity over the area of the beam and therefore only a portion of the area of the beam is usable for high-uniformity materials processing. In some cases, only the most uniform section or “filet” of the beam will be selected for use, and the non-uniform section of the laser beam will be discarded. Due to the premium price associated with UV photons, high beam utilisation in many cases is a key economic factor. Beam shaping optics and beam homogenisers can be employed to shape the beam and simultaneously make the laser energy uniform so that the maximum amount of the available laser power can be used. The resultant uniform, large area beam can then be subdivided using near-field imaging to project complex patterns onto a part or make simultaneous multiple laser ablations, a key advantage of UV Excimer lasers. Visit www.three-fives.com for the latest advanced semiconductor industry news