Flying Height Measurement of Magnetic Disk Using Double Common-path Heterodyne Interferometer

Abstract

The magnetic storage capacity depends significantly on the area density, which is close related to the flying-height (FH) of magnetic head. In this paper a double common-path heterodyne interferometer is proposed to measure the FH. The resolution of FH measurement reaches 0.1nm by means of phase measurement method. The influence of vibration of magnetic disk and work table is considered in the configuration design so as to reduce the system error. The experimental results show that the error compensation is better than 10nm when the vibration of disk is 1.2μm.