Abstract
The chemistry of reactions of CF <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> CI <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> used in optical fiber manufacture has been studied by infrared spectroscopy. Evidence is pesented to support a model of fluorine doping based on trichlorofluorosilane oxidation. Carbonyl fluoride has been identified as a major intermediate in the etching process.
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