Abstract
Systematic studies of electron interaction with perfluorinated targets carried out recently in our laboratory revealed a distinct increase of the total cross section, Qtot, over the impact energy range from a dozen or so to several tens of electronvolts. A likely reason for this striking feature is a significant contribution of elastic processes in this energy range. The ratio of the total ionization electron-scattering cross section to the total cross section can be expressed with a simple regression formula. That formula was used to estimate the GeH4 ionization cross section.
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