Abstract
Fluorescent yield X-ray absorption fine structure (XAFS) spectroscopy is widely used for measuring chemical or physical states of particular elements in materials. A superconducting tunnel junction (STJ) detector is promising for X-ray absorption spectroscopy, especially in a soft X-ray region below 1keV, because of an excellent energy resolution of 10–20eV, which is crucial for resolving the characteristic X-ray lines from dilute light elements in materials, and a high photon-counting-rate. We constructed an X-ray absorption spectrometer using a 100-pixel STJ array detector mounted on a cryogen-free 3He cryostat and a parallel data acquisition system. It has been confirmed that the STJ detector produces a single peak for the O-Kα line (525eV) with energy resolution of 22eV in full width at half maximum. An XAFS spectrum only for the oxygen atoms from a SiN/SiO2 thin film sample was successfully obtained by using the clear separation between the O-Kα line and the N-Kα line (392eV), eliminating the effect of the N-Kα background.
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