Abstract

In the current study, a two-dimensional numerical study is carried out to investigate the performance of a novel Double-Chamber Parallel Flexible Valve micropump, which utilized the electrowetting-on-dielectrics (EWOD) effect to drive the microfluid flow. By observing the flow fields, the internal circulations are seen on both the left and right sides of the pump. The generation of the backflow is discussed as well by tracking the movement of the vortices. Only slight flow fluctuations are seen in the micropump. Based on the simulation results, the structural parameters including the width of the inlet and the outlet, the width of the pumping channel and the diverging angle in the micropump are analyzed, and the influence of these parameters on the pumping volume and the maximum pressure are discussed. Eventually, a group of optimal parameter combinations is given according to the simulation results to extend the operating potential of the micropump.

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