Floating harmonic probe measurements in the low-temperature plasma jet deposition system

Abstract

The floating harmonic probe is a relatively new plasma diagnostic method, which was proposed for applications at conditions when insulating films are deposited on the probe and, consequently, the classical Langmuir probe method fails. In the floating harmonic probe method a purely sinusoidal AC voltage is applied to the probe constructed in a standard manner via a capacitor. From the spectral components of the measured AC probe current waveforms, the electron temperature and the positive ion density can be obtained. In this contribution we present the comparison of the electron temperature and density acquired by the floating harmonic probe method with those obtained by the classical Langmuir probe. The experiments are performed in the flowing DC discharge in argon. In addition, the results from the floating harmonic probe method obtained during deposition of an insulating iron oxide thin film are shown. All the data is complemented by the qualitative discussion.