Abstract
Flexible tactile sensors with large area and high spatial resolution are important for emerging applications in electronic skin, health monitoring, and human-machine interfaces. However, achieving flexible tactile sensor arrays with low cost, low crosstalk, high sensitivity, and high uniformity characteristics remains challenging. In this work, we demonstrate a flexible, transparent, active-matrix (AM) tactile sensor array (TSA) by monolithically integrating solution-processed indium oxide (In <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> O <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> ) thin-film transistor (TFT) array with a highly pressure-sensitive micro-pyramidal film. The integrated TFT-resistive sensor (1T-1R) cell exhibits high sensitivity (29.9 kPa $^{-1})$, fast response/recovery time (21/16 ms), and robust mechanical flexibility with a bending radius of 3 mm. Furthermore, the In <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> O <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> TFTs exhibit excellent uniformity by process optimization, enabling the construction of a prototypical $10 \times 10$ AM-TSA for user-interactive sensor interfaces, such as monitoring external pressure distribution and playing the Tetris game in a wearable and wireless manner.
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