Design of A Highly Sensitive, Flexible and Stretchable Tactile Sensor for Electronic Skin Applications

Abstract

Flexible tactile sensors can be described as an effective way to recognize the sense of touch. These sensors have great potential to be implemented to electronic skins, soft electronics, and related applications. Since the cost of flexible sensors in the market is quite high and their robustness is questionable, the use of flexible sensors has not yet reached the desired level in the electronics industry. This study introduces novel techniques for the design and production of low cost and high precision capacitive sensor arrays. The dielectric/conductive layers were formed by spin-coating the polymer-based material on the conductive material. Polydimethylsiloxane (PDMS) and nanoparticle doped PDMS were used to form the dielectric layer. In particular, capacitive properties using Platinum and Carbon doped PDMS can be used for modification of dielectric properties for specific applications. In this work, the fabrication of highly sensitive tactile sensor array has been successfully performed to be utilized in electronic skin applications. A 4x4 sensor array was designed for the prototype and electrical tests demonstrated promising sensing capability of sensors formed by metal/PDMS/metal layers.