Abstract
Flexible pressure sensors are important components of electronic skin and flexible wearable devices. Most existing piezoresistive flexible pressure sensors have obtained high sensitivities, however, they have relatively small pressure detection ranges. Here, we report flexible pressure sensors with a wide detection range using polydimethylsiloxane (PDMS) as the substrate, carbon nanotube films as the electrode material, and self-assembled polystyrene microsphere film as the microstructure layer. The obtained pressure sensor had a sandwich structure, and had a wide pressure detection range (from 4 kPa to 270 kPa), a sensitivity of 2.49 kPa−1, and a response time of tens of milliseconds. Two hundred load–unload cycles indicated that the device had good stability. In addition, the sensor was obtained by large-area fabrication with a low power consumption. This pressure sensor is expected to be widely used in applications such as electronic skin and flexible wearable devices.
Highlights
IntroductionElectronic skin and flexible wearable devices are two important flexible electronic technologies.The development of electronic skin is motivated by growing interest in artificial intelligence, human-machine interfaces, and prosthetic skin [1,2,3]
Electronic skin and flexible wearable devices are two important flexible electronic technologies.The development of electronic skin is motivated by growing interest in artificial intelligence, human-machine interfaces, and prosthetic skin [1,2,3]
This pressure sensor is expected to be widely used in applications such as electronic skin and flexible wearable devices
Summary
Electronic skin and flexible wearable devices are two important flexible electronic technologies.The development of electronic skin is motivated by growing interest in artificial intelligence, human-machine interfaces, and prosthetic skin [1,2,3]. Flexible wearable devices have promising potential for use in health monitoring and nursing applications [4,5]. Tactile sensing is one of the fundamental functions of skin, and electronic skin will be developed based on flexible pressure sensors. Piezoresistive flexible pressure sensors have been widely studied and applied due to their simple structures and working mechanisms, relatively simple fabrication processes, and excellent performance. Micro-structured polydimethylsiloxane (PDMS) is commonly used as a substrate when combined with carbon nanotubes, graphene, or another conductive material as the electrode. This basic approach can be used to fabricate piezoresistive flexible pressure sensors [23,24,25,26,27]
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