Flexible wide-range capacitive pressure sensor using micropore PE tape as template

Abstract

Flexible pressure sensors based on capacitive induction have become a research hot-spot because of low energy consumption and excellent performance in recent years. In practical applications, a wide range of detection and low-cost mass-produced flexible pressure sensors are ideal. Herein, this paper presents a wide detection range capacitive pressure sensor based on a structured elastic electrode, which is low cost and can be mass-produced by a simple method of micropore PE tape molding. Test results show that the sensor’s pressure detection range is 0–45 kPa. This is because the upper structure of the capacitive sensor is constantly changing when subjected to different external pressures, so that the contact area of the upper substrate of the sensor becomes larger and the distance between the upper and lower substrates becomes smaller. In addition, this capacitive pressure sensor exhibits low detection limit (<300 Pa), ultra-short response time (<50 ms) and high operational stability for repeated loading/unloading pressure cycles. The sensor owns excellent resolution and can distinguish language, and the sensor can be used to monitor pulse. Low-cost mass production and wide detection range of flexible capacitive pressure sensors lay the foundation for the development of electronic skin, contact inspection applications and wearable healthcare monitors.