Flexible microneedle array electrode using magnetorheological drawing lithography for bio-signal monitoring

Abstract

Monitoring and timely intervention are extremely important in the continuous home care. Microneedle array electrode (MAE) have been employed for the long-term bio-signal monitoring without skin preparation. We developed a novel magneto-rheological drawing lithography (MRDL) method to cost-effectively fabricate a flexible micro-needle array electrode (FMAE) for the wearable bio-signal monitoring. Flexible substrate may match closely with curved skin and maintain a stable interface between skin and electrode. The formation mechanism of microneedle array (MA) by MRDL and bio-signal recording performance of FMAE were investigated. MA can be one-step drawn from the droplet array of curable magnetorheological fluid under the assist of external magnetic field. Ti/Au film was coated on the surface of solidified MA to insure the conductivity and compatibility of FMAE. 36-FMAE consists of 6×6 micro-needles with an average height of 600μm and an average tip radius of 12μm. FMAE with 36 needles (36-FMAE) shows a better bio-signal monitoring performance in some specific situations compared with flexible dry electrode (FDE) and commercial Ag/AgCl electrode. Electrode-skin interface impedance (EII) measured by 36-FMAE is the lowest at a given low input frequency and the amplitude of electrocardiography (ECG) and electroencephalography (EEG) signals recorded by 36-FMAE is the largest. 36-FMAE can collect more distinguishable features and weaken the effect of motion artifact during the dynamical ECG recording. Therefore, 36-FMAE is a promising sensor for the wearable bio-signal monitoring in home care.