Abstract
The HfO2-based ferroelectric tunnel junction has received outstanding attention owing to its high-speed and low-power characteristics. In this work, aluminum-doped HfO2 (HfAlO) ferroelectric thin films are deposited on a muscovite substrate (Mica). We investigate the bending effect on the ferroelectric characteristics of the Au/Ti/HfAlO/Pt/Ti/Mica device. After 1000 bending times, the ferroelectric properties and the fatigue characteristics are largely degraded. The finite element analysis indicates that crack formation is the main reason for the fatigue damage under threshold bending diameters. Moreover, the HfAlO-based ferroelectric synaptic device exhibits excellent performance of neuromorphic computing. The artificial synapse can mimic the paired-pulse facilitation and long-term potentiation/depression of biological synapses. Meanwhile, the accuracy of digit recognition is 88.8%. This research provides a new research idea for the further development of hafnium-based ferroelectric devices.
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