Abstract

With reference to the mainstream technology, the most relevant failure mechanisms which affect yield and reliability of Flash memory are reviewed, showing the primary role played by tunnel oxide defects. The effectiveness of a good test methodology combined with a proper product design for screening at wafer sort latent defects of tunnel oxide is highlighted as a key factor for improving Flash memory reliability. The degradation of device performance induced by program/erase cycling is discussed, covering both the behaviour of a typical cell and the evolution of memory array distribution. The erratic erasure phenomenon is illustrated as the most relevant mechanism reported so far to cause single bit failures in endurance tests. Finally, reliability implications of multilevel cell concepts are briefly analysed.

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