First-principles study on the structure and stability of defect complexes and clusters in nitrogen-doped Czochralski silicon

Zirui He,Xiang Lu,Haojun Hu,Siqing Shen,Yongli Liang,Shang-Peng Gao,Hao Hu,Meng Chen

doi:10.1039/d4ce01104j

First-principles study on the structure and stability of defect complexes and clusters in nitrogen-doped Czochralski silicon

Zirui He, Xiang Lu + Show 6 more

https://doi.org/10.1039/d4ce01104j

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Journal: CrystEngComm

Publication Date: Jan 1, 2025

#Crystal Originated Particles #Nitrogen-doped Czochralski Silicon #Bulk Micro-defects #Czochralski #First-principles Study #Nitrogen-doped Silicon #Clusters In Silicon #Stability Of Clusters #Structure Of Clusters #Defect Clusters

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In Czochralski (CZ)-Si, crystal originated particles (COPs) and bulk micro-defects (BMDs), which are primarily composed of voids and O-precipitates (OPs), respectively, have profound influences on the properties of wafers and...

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First-principles study on the structure and stability of defect complexes and clusters in nitrogen-doped Czochralski silicon