Abstract
DNA biosensors based on silicon carbide nanowire bioFET (SiC NW bioFET) benefit from both biocompatibility and semiconducting properties of SiC. One of the device realization key points is the functionalization of the SiC NW. This process is composed of two main steps: silanization and DNA grafting. It has been successfully carried out on both SiC single crystals and SiC nanopillars. Evidences of DNA detection are given by X-Ray photoelectron Spectroscopy (XPS) and fluorescence microscopy.
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