Abstract
Electron-stimulated secondary electron emission (SEE) spectra of diamond type 2a, highly oriented pyrolytic graphite (HOPG), glassy carbon (GC) and diamond chemical vapour deposition (CVD) films were measured in the 0–75 eV electron kinetic energy range. It has been established that the SEE spectra are characteristic of the different carbon surfaces and very sensitive to crystal order. For crystalline carbon structures, HOPG and diamond type 2a the SEE spectra in the 0–75 eV range were found to be very different, reflecting high energy conduction band states in agreement with band structure calculations and other spectroscopic techniques sensitive to the electronic density of empty states. For GC the SEE spectrum in the 0–40 eV range is smeared compared with that measured for HOPG. However, in the higher electron kinetic energy range the SEE spectra of HOPG and GC are similar. The sensitivity of SEE relative to Auger electron spectroscopy in a case study of the near-surface region of diamond CVD films is discussed. It is concluded that SEE spectroscopy can be used as a very sensitive tool for the characterization of different carbon structures in the near-surface region.
Published Version
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