Abstract
We report the characteristics of InGaAs-based independent double-gate FinFETs with Al2O3/LaAlO3 as gate dielectric. The device can be operated in three different modes ( i.e., single-, double-, and independent double-gate) made possible by the physically separated two sidewall gates. When the device is operated in the double-gate mode, it exhibits better performance in terms of the On/Off current ratio, subthreshold swing, Off current, and channel mobility than in the single-gate mode. In addition, independent double-gate operation makes it possible to modulate channel properties by applying a bias at the opposite gate via gate coupling effects. Our systematic measurements reveal that gate control and coupling effects are enhanced with reduced fin width.
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