Films of immiscible systems obtained by three-electrode ion-plasma sputtering

Abstract

The data on the ion-plasma sputtering of composite targets of the systems (Fe, Co, Ni) – (Ag, Bi) whose components do not mix in the liquid state is presented. The lattice parameters and sizes of crystals of metastable phases were determined. The films deposited show the formation of supersaturated solid solutions ore nanocrystalline and amorphous phase. The decomposition of metastable phase is accompanied by precipitation of equilibrium solid solutions based on incoming elements ore an intermediate phase. We studied the thermal stability of metastable states in (Fe, Co, Ni) – (Ag, Bi) films, the electrical and hysteresis magnetic characteristics of as-deposited and heat-treated films and established the optimum film compositions with precise values of temperature coefficient of resistivity (∼ 10−5 K−1) and high coercive force (H c ∼ 150 kA/m). Such films can be promising for use as thin-film precision resistors and magnetic information carriers with an increased recording density.