Abstract
A film bulk acoustic resonator of the present invention includes an upper electrode 104 , a lower electrode 102 , and a piezoelectric film 103 as well as an acoustic multilayer 120 that are provided between the upper electrode 104 and the lower electrode 102 . Thus, a distance between the upper electrode 104 and the lower electrode 102 is extended by a thickness of the acoustic multilayer 120 , and electrostatic capacitance between the upper electrode 104 and the lower electrode 102 per unit area can be reduced accordingly. Therefore, an electrode area can be increased as compared to when there is no acoustic multilayer 120 , and an influence of grains of a piezoelectric material can be reduced.
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