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Abstract
In this paper, the finite element method was employed to study the electrode influence on the effective electromechanical coupling coefficient of thin film bulk acoustic resonators (FBARs). A three-dimensional FBAR model was built to characterise the resonator behaviour. The calculation results revealed that the electrode properties including electrode material, electrode configuration, electrode area and the thickness ratio of electrode/piezoelectric layers had a significant effect on the of the device. Since the electrode has a pronounced influence on the performance of FBAR, it is necessary to take electrode parameters into account during the subsequent design stage of FBAR filters or sensors based on FBAR.
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