Abstract
The fillability and imprintability of a Ni-based bulk metallic glass (BMG) prepared by the precision die-casting was investigated. A three-dimensional microgear made of Ni-based BMG is successfully prepared by the precision die-casting technique. The cast Ni-based BMG has excellent fillability against a microindentation formed by Vickers indentation, and the filling area obtained using a confocal scanning microscope reaches 99%. In addition, the cast Ni-based BMG exhibits excellent imprintability of the die surface even on a nanometer scale. It is therefore concluded that the Ni-based BMG is suitable as a material for micromachines due to its superior fillability and imprintability.
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