Abstract
Zinc oxide is a direct, wide bandgap semiconductor material with many promising properties for blue/UV optoelectronics, transparent electronics, spintronic devices and sensor applications. In this work, zinc oxide films were deposited by RF magnetron sputtering on different substrates. The images of field-emission SEM are used to analyse the structures of the samples, and some novel structures of the ZnO thin films grown on quartz glass and normal glass substrate are found. The x-ray diffraction is used to analyse the grain structure of these samples, it is shown that films grow mainly with the hexagonal c-axis perpendicular to the substrate surface.
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