Abstract
The field emitter array (FEA) conception with tip’s density up to 1010 cm−2 based on natural porous anodic alumina is proposed and its realizability is demonstrated. The basic technological steps of FEA based on the anodic alumina and emission characteristic are shown.
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More From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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