Abstract
The changes in the current-voltage characteristics and electron emission spatial distribution of microfabricated field emitters following exposure to hydrogen low-pressure glow discharges have been investigated. The hydrogen discharge was found to result in a work function decrease typically between 0.5 and 1.5 eV following a dose of 1018–1019 ions/cm2. The net result is a reduction in the operating voltage and an improvement in the spatial uniformity of the electron emission.
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