Field emission pressure sensors with non-silicon membranes

Abstract

We report on the fabrication of cold cathode emitter and the design parameter simulation of a functional field emission-based pressure sensor. This device comprises a membrane made of metallic compound acting as the anode in front of a flat cold cathode emitter. First, the mechanical deflection of a diaphragm under selected input pressures is modeled. The current density distribution in the deflected diaphragm is then calculated using realistic field emission characteristics from fabricated sulfur doped boron nitride (S-BN) cold cathode device. The total current output was found by integrating the measured current density of the fabricated electron emitter device over the entire diaphragm area of the membrane as function of external pressure. The results show that conventional silicon membranes would pose problems when implemented in a real field emission device, and show how the use of unconventional materials (i.e., TiN) can help overcome these problems.