Field emission of nitrogen doped DLC films deposited by PECVD

Kyu Chang Park ,Jin Jang Jin Jang,Joonoh Moon ,Jae Gak Kim ,Myung Hwan Oh ,Suk Jae Chung

doi:10.1109/ivmc.1996.601821

Field emission of nitrogen doped DLC films deposited by PECVD

Kyu Chang Park , Jin Jang Jin Jang + Show 4 more

https://doi.org/10.1109/ivmc.1996.601821

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Publication Date: Jul 7, 1996

Citations: 1

Affiliation: Kyung Hee University, Korea Institute of Science and Technology

#Diamond Like Carbon #Doped Diamond Like Carbon Films + Show 8 more

Abstract
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Abstract

The N doping effect on the electrical conductivity and electron emission property for diamond like carbon (DLC) films deposited by PECVD has been studied. The electrical conductivity can be widely varied by n-type doping of the DLC. The relationship between the prefactor of conductivity and the conductivity activation energy satisfy the Meyer-Neldel relation: /spl sigma//sub 0/=/spl sigma//sub 00/exp(AE/sub a/) with A=19 eV/sup -1/ and /spl sigma//sub 00/=9/spl times/10/sup -8/ S/cm. The emission currents for heavily N doped DLC films are much higher than undoped DLC even though lightly N doped films show much smaller currents.

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