Field emission of nitrogen doped DLC films deposited by PECVD

Kyu Chang Park Kyu Chang Park,Myung Hwan Oh Myung Hwan Oh,Jong Hyun Moon Jong Hyun Moon,Suk Jae Chung Suk Jae Chung,Jin Jang Jin Jang,Jae Gak Kim Jae Gak Kim

doi:10.1109/ivmc.1996.601821

Field emission of nitrogen doped DLC films deposited by PECVD

Kyu Chang Park Kyu Chang Park, Myung Hwan Oh Myung Hwan Oh + Show 4 more

https://doi.org/10.1109/ivmc.1996.601821

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Publication Date: Jul 7, 1996

Citations: 1

Affiliation: Kyung Hee University, Korea Institute of Science and Technology

#Diamond Like Carbon #Doped Diamond Like Carbon Films + Show 8 more

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Abstract

The N doping effect on the electrical conductivity and electron emission property for diamond like carbon (DLC) films deposited by PECVD has been studied. The electrical conductivity can be widely varied by n-type doping of the DLC. The relationship between the prefactor of conductivity and the conductivity activation energy satisfy the Meyer-Neldel relation: /spl sigma//sub 0/=/spl sigma//sub 00/exp(AE/sub a/) with A=19 eV/sup -1/ and /spl sigma//sub 00/=9/spl times/10/sup -8/ S/cm. The emission currents for heavily N doped DLC films are much higher than undoped DLC even though lightly N doped films show much smaller currents.

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