Abstract
Abstract FIB/SEM tomography is a serial sectioning method in which the cross-sectional area of the sample is stepwise removed with a focused ion beam (FIB) and the exposed cross-sectional area is imaged with a scanning electron microscope (SEM). All imaging techniques of the SEM can be used, which allows the application to a wide range of materials science questions. On the one hand, resolutions of a few nm can be achieved, and on the other hand, volumes with edge lengths of 100 μm and more can be examined. This article gives an overview of the current state of the art and the practical implementation of FIB/ SEM serial sectioning. The special aspects of the integration of energy dispersive X-ray spectroscopy (EDS) and electron backscatter diffraction (EBSD) are also discussed.
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