Abstract
The anodization reaction of 6H‐SiC using a HF solution was investigated to understand the formation of porous SiC. The anodization reaction proceeds via two stages in which the oxidation of SiC is followed by the removal of SiO by fluorine ions. The microstructure of porous SiC changes from fibrous to dendritic as the anodization current is increased, and also shows other transitional morphology. The photoluminescence of these porous SiC with different microstructures was also investigated, and the photoluminescence band of higher energy was found to become enhanced as the microstructure of porous SiC changed from fibrous to porous dendritic.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
